Microstructure Analysis

22 Şubat 2017 - Çarşamba

Scanning Electron Microscope (SEM) Microanalysis (EDX-WDX) ve Phase Determination (EBSD)

There exists three scanning electron microscopes in the electron microscope laboratory. These microscopes are used dependent on needed resolution, magnification, or analysis type. Using scanning electron microscopes and microanalysis units of different working principals, morphological investigation of all types of defects located in sections or broken surcafes of raw materials which are in powder or massive form can be analyzed in nanosize. Also elemental chemical analysis of different areas, line analysis, phase determination and phase mapping, colourful composition visualization, crystallographic structure analysis, particle size and particle size distribution etc. can be examined.

Transmission Electron Microscope

Besides the scanning electron microscopes, there also exists Energy Filtered Transmission Electron Microscope (EFTEM) and Scanning Transmission Electron Microscope (STEM) in order to be used in special projects in electron microscope laboratory. As EFTEM filters and classifies electrons passing through samples of about 100 nm thickness, STEM scans electrons on sample surface with scanning coils and collects electrons so that it is possible to inspect inner structure of the material in atomic size. Bright field, dark field, high angle dark field, high resolution transmission electron microcope display, and diffraction patterns in micro and nano size can be obtained using EFTEM and STEM.


It is possible to make quantitative analysis of low-atomic number elements like Li, B, C, O and N using electron energy loss spectroscopy (EELS) and energy diffraction spectroscopy (EDX) in EFTEM and STEM. Also using 'Drift Correction' property, chemical analysis of two or more points that take place in experimental area, and elemental phase mapping can be performed in long analysis time periods, and high resolution chemical datas can be obtained. Samples that will be inspected in EFTEM and STEM should have less than 100 nm thickness, and should be thinned until desired thickness is observed.

Optical Microscope

Optical micrroscope is used in cases where high magnification (more than 1000x) is not needed. A general microstructural view is obtained. This structural vision gives information about general particle size and pore distribution of products. It is preferred in situations when fast qualitative or approximate numeric control of crystallization in product or layer thickness and similar features should be examined.

Atomic Force Microscope

Atomic force microscobe is a system where force relations arised from a probe's interaction with a surface is being watched. It usually has two modes like "contacting" and "not-contacting". It's general usage aim is 3 dimensional surface view, nanolitography, determination of surface roughness and thickness calculation in nano size.

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